International Journal of Scientific & Technology Research

Home About Us Scope Editorial Board Blog/Latest News Contact Us
10th percentile
Powered by  Scopus
Scopus coverage:
Nov 2018 to May 2020


IJSTR >> Volume 2- Issue 5, May 2013 Edition

International Journal of Scientific & Technology Research  
International Journal of Scientific & Technology Research

Website: http://www.ijstr.org

ISSN 2277-8616

Study On Artificial Hair MEMS As Flow Cell Sensors Application

[Full Text]



Mohd Afzan Sharom, S. M. Firdaus, Ishak Abd Azid



Key words: Flow Sensor, Cantilever, Micro-electro-mechanical-system (MEMS), Stress, Artificial Hair Cell



Abstract: This paper presents the mechanical modelling and finite elements analysis (FEA) based on cantilever and artificial hair cell MEMS as flow sensors. The structure of this biomimetic flow sensor consists of a single cylindrical hair cell which is perpendicular to a cantilever length of 10000µm. The Sensor performance is measured by the distribution of Stress occurrence and displacement. In order to study the sensor force of 0.02N represent gas flow the force which is applied to cylindrical hair cell variation of the width of cantilever and height of the cylindrical hair cell. The FEA result shows the highest stress occurred as the width of the cantilever decrease while the displacement increase also when the width of cantilever decrease.



[1]. T. W. Lim,Y. Song, D. Y. Yang, H. J. Kong, K. S. Lee, S. H. Park, "Highly effective three-dimensional large-scale microfabrication using a continuous scanning method," Applied Physics A: Materials Science & Processing, vol. 92, pp. 541-545, 2008.

[2]. C. Y. Lee,Y.H. Wang, T. H. Hsueh, R. H. Ma, L. M. Fu,P. C. Chou,"A smart flow sensor for flow direction measurement," Advanced Materials Research, vol. 47, pp. 189-192, 2008.

[3]. M. Shikida, K. Yoshikawa, S. Iwani, K. Sato, "Flexible flow sensor for large-scale air-conditioning network systems," Sensors and Actuators A: Physical, 2011.

[4]. U. Schmid, "A robust flow sensor for high pressure automotive applications," Sensors and Actuators A: Physical, vol. 97, pp. 253-263, 2002.

[5]. N. Nguyen, "Micromachined flow sensors--a review," Flow measurement and Instrumentation, vol. 8, pp. 7-16, 1997.

[6]. J. Brugger, M. Despont, C. Rossel, H. Rothuizen, "Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry," Sensors and Actuators A: Physical, vol. 73, pp. 235-242, 1999.

[7]. Y. Su, AGR. Evans, A. Brunnschweiler, G. Ensell, "Characterization of a highly sensitive ultra-thin piezoresistive silicon cantilever probe and its application in gas flow velocity sensing," Journal of Micromechanics and Microengineering, vol. 12, p. 780, 2002.

[8]. T. Shimozawa, T. Kumagi, Y. Baba, "Structural scaling and functional design of the cercal wind-receptor hairs of cricket," Journal of Comparative Physiology A: Neuroethology, Sensory, Neural, and Behavioral Physiology, vol. 183, pp. 171-186, 1998.

[9]. M. Madou, "Fundamentals of microfabrication. 1997," CRC Press LLC. Capítulo, vol. 1, pp. 1-50.

[10]. T. Shimozawa, Masamichi, "The aerodynamics and sensory physiology of range fractionation in the cereal filiform sensilla of the cricketGryllus bimaculatus," Journal of Comparative Physiology A: Neuroethology, Sensory, Neural, and Behavioral Physiology, vol. 155, pp. 495-505, 1984.

[11]. O. Dangles,C. Magal, D. Pierre, A. Olivier, J. Casas, "Variation in morphology and performance of predator-sensing system in wild cricket populations," The Journal of experimental biology, vol. 208, pp. 461-468, 2005.

[12]. Q. Zhang,W. Ruan, H. Wang, Y. Zhou, Z. Wang, L. Liu, "A self-bended piezoresistive microcantilever flow sensor for low flow rate measurement," Sensors and Actuators A: Physical, vol. 158, pp. 273-279, 2010.

[13]. P. Benham, R. Crawford, C. Armstrong, "Mechanics of engineering materials, 1996," Harlow Longman Group.

[14]. E. Finot, A. Passian, T. Thundat, "Measurement of mechanical properties of cantilever shaped materials," Sensors, vol. 8, pp. 3497-3541, 2008.

[15]. G.-R. Liu, Mesh free methods: moving beyond the finite element method: CRC, 2009.